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0090-01192 AMAT 半导体系统
0090-01192 AMAT 半导体系统
0090-01192 AMAT 半导体系统
Edwards公司在2014年全国炼钢学术会议(China Steel Making Conference 2014)上重点展示用于钢铁脱气工艺的干式机械真空泵设备的经济效益和环境效益,两年召开一次的会议于5月21-23日在中国西安举办,由中国金属学会主办。Edwards公司要传递的主要信息是干泵真空系统可为钢铁脱气工艺提供诸多优势,这项技术取代了蒸汽喷射器的使用。
相比蒸汽喷射器,业界已证明干泵设备能够降低高达97%的能源成本。由于特殊的要求,二次冶金工艺可以受益于更多依赖于真空设备,其高可靠性和可信赖的性能是关键考虑因素。更高的抽吸速度、较低的极限真空度、最少的维护和较少的环境影响,更进一步增加了使用机械干泵的必要性。
Edwards是二次真空精炼领域的全球真空技术领导者,该技术用于生产优质钢。Edwards公司在此领域的首个重大成功安例是在重庆钢铁公司(ChongQing Iron and Steel)安装了世界上第一套RH机械泵。从那时起,Edwards不断增加在中国的设备安装数量,在过去的12个月里,公司已经赢得三个主要项目,用于进一步的真空脱碳(Vacuum Decarburisation,VD)及Ruhrstahl和Heraeus吹氧(Ruhrstahl and Heraeus Oxygen Blowing,RH-OB)装置。
Edwards公司炼钢脱气全球市场经理Anke Teeuwsen表示:“Edwards在中国市场正在快速发展。在产量方面,中国仍然是钢铁生产领域无可争议的世界领导者,但是,中国企业正在寻求提高钢铁行业的效率。随着蒸汽喷射器被机械真空设备所取代,Edwards公司在这一过程中发挥着核心作用,而且,我们完全致力于实施这项转变,为中国市场的每一家企业带来利益。”
Edwards公司Anke Teeuwsen将在会议上发表两项演讲,第一天她将讨论干式机械设备与蒸汽喷射器对比的经济优势和环境优势,第二天她将重点探讨干式机械真空泵设备的优化。
Edwards提供一系列经优化的模块化干式真空解决方案,适合所有的处理吨位,适用于RH-OB、真空脱碳吹氧(Vacuum Decarburisation Oxygen Blowing,VD-OB)和真空氧气脱碳(Vacuum Oxygen Decarburisation,VOD)等钢铁脱气应用。Edwards在提供用于钢铁行业的机械真空泵方面具有显著的优势,并且拥有丰富的全球市场背景经验,公司在全球钢铁行业拥有最大的干泵安装基数。
Edwards利用其丰富的经验参与会议论文集工作,重点介绍用于钢铁脱气的Edwards MAXX 脱气模块。Edwards全新模块化MAXX 模块的基础是公司对客户应用的深入了解以及为二次冶金过程提供干式真空解决方案的专有技术。
MAXX模块是Edwards用于二次冶金过程之干式设备系列的最新产品,具有诸多优势:
灵活性—优化性能、增加冗余且易于安装,适合小型钢水包规格
智能化—机载智能驱动,易于控制集成并降低安装成本
经济性—小占地面积、最少的维护和低运营成本
环境友好—安静运行、低碳排放和环境友好
AMAT 0190-22090 WAFER LOADER ORIENTERAMAT 0190-18063 DC POWER SUPPLY, REMOTE PLASMA CLEAN, UL
TOKYO ELECTRON TEL UBRPD5A-1T3 CHILLER 3M80-00181-11 3PHASE DAIKEN
AMAT 0021-23106 FLAG, ROTARY HOME, PPR, IECP
NEW!!!! TEL TOKYO ELECTRON AQA-K09-TYP2 CHILLER P12XL 60 DAY WARRANTY
AMAT 0010-13713 HV MODULE, PLASMA SPRAYED CESC, DPS 200M
AMAT 9010-02276 GAS MODULE WIRED HP-C02
AMAT 9010-02276ITL GAS MODULE WIRED HP-CO2
AMAT 9010-02455 GAS MOD'L, SA-HP GEF4
AMAT 9010-02456 GAS MOD'L, SA-HP, SIF4
KENSINGTON LABORATORIES 15-0000-0028-02 Wafer Transfer system with
wafer oriente
AMAT 0010-39339 200MM SWLL LLB SINGLE SLOT WAFER LIFT HO
KENSINGTON 35-3700-1725-03 Robot XYZ with M4000 Servo Positioning
Controller +ca
AMAT 50709337100 MVA Y Cover
AMAT 0040-07962 RING, CLAMP, LOWER, 200MM, LTE/E-CLEAN
AMAT 0010-39338 200MM SWLL LLA SINGLE SLOT WAFER LIFT HO
ASML PAS 2500 5000 STEPPER HINDS PHOTOELASTIC MODULATOR ELECTRONIC
HEAD DPEM 200
ASML PAS 2500 5000 STEPPER TESA BOX
NEW TEL TOKYO ELECTRON MIRROR UNIT CT5080-191951-11 GD309362
ELLIPSOIDAL MIRROR
AMAT 0010-40256 LIFT ACTUATOR ASSY, E-CHUCK
AMAT 0010-40296 ANTENNA-DOME ASSY,DOS,MARK IV,CHAMBER
NOVELLUS 15-120948-00 CYLINDER,SOURCE,DFE
AMAT 0190-77284 NOVA CONTROL UNIT
SMC Dual Chiller INR-341-42A Chiller-Heat Exchanger
HEATEFLEX CORP LHM-1-07-C-A00-93 ULTRA-PURE FLUID
HEATING/HEATER,VOLT,20S AMP,
INFICON J3TF34B04631 Transpector CIS2 ResidualGas Analyzer
SystemSerial Numb
AMAT 0090-35771 Gas Heat Exchange Assembly, Tantalum
TEL VESTA TOKYO ELECTRON 300MM ESC CHUCK 2X30B-80811
TEL VESTA TOKYO ELECTRON 300MM ESC CHUCK 2X004T-00111
TEL VESTA TOKYO ELECTRON 300MM ESC CHUCK 1201B-48512
TEL VESTA TOKYO ELECTRON 300MM ESC CHUCK 1206B-45812
TEL VESTA TOKYO ELECTRON 300MM ESC CHUCK 3400IT-07913
AMAT 9240-02836ITL EXTRACTION LIFT ASSY/LOCKNLOAD
NOVELLUS 02-127707-00 ASSY SYS CONT P166-64-24V
AMAT 0224-49143 LFC, .2G/MIN
KOMATSU ELECTRONICS FR-531-B CHILLER KCE-53WS CONTROLLER DNS80
DAINIPPON SCREEN
AMAT 0242-37433 KIT,RETROFIT CORR RES 200MM EMPAK CASS H
AMAT 9090-01095 FI CONTROL CHASSIS
EBARA J2-12SLOT CMP VME Controller J2-12SLOT (2) AVME-352, (3) AVME-
510, (3) UV-
ROHDE & SCHWARZ FSH6 6 GHz Handheld Spectrum Analyzer Preamp Track Gen
FSH-Z2
AMAT 0100-01543 PCB, ASSEMBLY, I/O CONNECTION, ECP
AMAT 0227-95226 WEIGHT, 200MM CASSETTE, CLAMPING
AMAT 9010-01157 EXTRACTION ROTATE/SLIDE MECH
AMAT 0242-15018 KIT,IS,CONS,PLANAR,200MM NOTCH,KALREZ
AMAT 0040-60593 LASED, PEDESTAL, 200MM, JMF SMALL FLAT D
XYCOM XYCOM 3115T RQAUS1
XYCOM XYCOM 3115-0113111016002 RQAUS1
XYCOM XYCOM 9487-27A1317011000 RQAUS1
XYCOM PROFACE GP570-TC11 RQAUS1
XYCOM PROFACE GP477R-EG11 RQANS1
XYCOM PROFACE GP570-TC11 (REV K) RQAUS1
ASML PAS 2500 5000 STEPPER BAR CODE READER 4022.430.0023
LAM RESEARCH 2300 COMPUTER 853-025872-105 KIMBALL
CANON STEPPER RETICLE LOADER FPA-2000i1 or FPA-1550MIV SR08
DNS DAINIPPON SCREEN SS80B MAINFRAME COMPUTER (PRC-2193P-06V4-25/B)
TEL TOKYO ELECTRON FURNACE ALPHA CONTROL BOX 3Z80-000665-V1
CANON FPA-2000i1 or FPA-1550MIV STEPPER WAFER LOADER
AMAT 0010-01368 COVER, LID PLTE ASSY, SACVD, DXZ, FLUORI
AMAT 0190-02815 WELDMENT, POST HEAT W/SHUT OFF VALVE, 30
AMAT 0500-00192 MAIN CONTROL UNIT THERMO CHILL
AMAT 0500-00277 HELIX IS CONTROLLER 19" RACK
AMAT 9240-06151 KIT, OPTION SDS ASH3/PH3, 4 TOR
DNS SSW-629-8 Scrubber
DNS SSW-629-8 Scrubber
XYCOM OPERATOR INTERFACE 3512 KPM, 3512KPM, PART NO: 3512-
A1F114103300U
XYCOM XYCOM 8450-HU RQAUS1
AMAT 9240-02836 EXTRACTION LIFT ASSY/LOCKNLOAD
XYCOM PROFACE PS3651A-T42-24V-5M-SU RQANS1
AMAT 0190-10680 BALL SCREW & RECIRCULATING BALL NUT REPL
XYCOM PROFACE GP470-EG11 RQAUS1
XYCOM AUTOMATION PANEL 3115T
AMAT 0040-48339 Faceplate, Dual Gas, 200MM TICL4 TIN
DAINIPPON SCREEN DNS PMC I/O BASIC ASSY
ULVAC CRYOGENICS,INC. C30ZR COMPRESSOR UNIT, MODEL NO.C30ZR, SERIAL
NO, CS1274
XYCOM XYCOM 3715-KPM RQAUS1
XYCOM XYCOM 3715-KPM (T) RQAUS1
AMAT 0010-a7810 UV Relay Assy
AMAT 0090-91510 ORNT MICROPROCESSOR UNIT
AMAT 9010-02159 EXTRACTION ROTATE/SIDE MECH
NIKON NSR S202A RETICLE BLINDS
AMAT 0190-05276 CDO,LWR DOUBLE SECONDARY-TOWER,C-276,HAST
AMAT 0010-A0208 IPM ELecricity Box
XYCOM PROFACE GP477R-EG11 RQANS2
AMAT 0195-00185 HV ESC VACUUM HARNESS ASSEMBLY
AMAT 0040-40865 Heater Mounting Plate 300MM Anneal
ASML PAS 2500 5000 STEPPER ULTRA CLEAN AIR FOOT BELL 374
DNS 80 DNS80 DAINIPPON SCREEN MAIN CONTROLLER EEBH-0011X1 IGK3S
AMAT 0010-76340 ASSY 6" HTHU BUFFER BLADE
AMAT 0020-88831 Turbo Pump
AMAT 0040-35851 Pedestal, ESC 195mm, Flat, DPS Chamber
AMAT 0040-91670 PLATE, TILT AXIS STATIONARY
AMAT 0242-37454 KIT,BASIC GAS BOX,UNIVERSAL CHAMBER
Advanced Energy 27-344537-00 Apex 5513 RF Generator, 13.56MHz 208VAC
AMAT 9090-1265ITL DECEL PSU -6KV QUANTUM X
Advanced Energy 3150852-004 RF Generator, VHF 2060, 208VAC appears new
LAM RESEARCH 853-031685-001 LAM 9600 TCP MATCH
RIETSCHLE VLT 10 Process Vacuum
WJ WJ-TEOS958CRS TEOS Delivery System
MKS Vacuum Gauge Calibration and Verification System
VARIAN E11054660 ASSY, ES GAS DRY
AMAT 0040-90122 PLATE, Y AXIS STAIONARY BEA
MRL INDUSTRIES 4600819112 REV 2 CORE, BLACK MAX FURNACE HEATER ELEMENT
EXT NG 34
AMAT 0195-01051 BOARD ASSY DSG
XYCOM PROFACE GP2600-TC41-24V RQAUS1
AMAT 1120-A0150 LENS-OBJECTIVE
AMAT 9090-01181ITL AMAT Implant Controller CHAS PLASMA FLOOD (AR) DC
DAQ, 9090-0
XYCOM PROFACE GP577R-SC11 RQAUS1
XYCOM PROFACE GP577R-SC11 (REV J) RQAUS1
XYCOM PROFACE GP450-EG11 RQAUS1
NOVELLUS 27-251604-00 TURBO PUMP TMP 2000L LEYBOLD
NICHIYO ENGINEERING CORP. 07030 UNIT OZONE KILLER, MODEL KCM-480G ,
07030
HERAEUS 44798 PLATE, DISPERSION, QTZ RECIRC, SULFURIC, 9400
AVIZA 602783-09 SVG-Thermco VTR ELEMENT, HEATER, AVIZA 602783-09
AMAT 9240-00172ITL END EFFECTOR & MAPPER 300
CANON KBB05622 6 INCH RETICLE STAGE
SINFONIA SSM-2075BGMS-C SUMITOMO CYCLO DRIVE CNVX-4105-LB-11 WITH
SHINKO SS-SERV
AMAT 0190-01905 CONTROLLER, SETCH LL HEATER
AMAT 0020-48892 CLAMP RING, 6" SMF, AL, EE 2.00MM, 4TABS
VARIAN E11001000 LEFT ARM SERVO CONTROLLER
AMAT 0020-02126 BELLOWS SEAT, BOTTOM, REV. 5.2 HEAD, ECP
AMAT 0227-01117 WLDMNT, DUAL VALVE, FEM/FEM, MNL/MNL
AMAT 220550586 V18 ASSY LEO
AMAT 9090-01265 DECEL PSU -6KV QUANTUM X
LAM 853-012600-102 INDEXER,REC,W/ENCLOSURE
TEL MB3S80-000332-11 ROTARY, DRIVE FEEDTHRU; 447-21765-00; C24707 52-
132058B
391-41000-02 NOVA COMPUTER CONTROL UNIT
AMAT 0190-35798 16 CHANNEL TEMPERATURE CONTROLLER
AMAT 0040-98210 Assembly, Bellows Vacuum Robot
XYCOM PROFACE 5019T RQAUS1
XYCOM XYCOM 9465-KPM RQAUS1
AMAT 0020-12396 TOP PLATE HEATER ECP ANNEAL 300MM
AMAT 0010-10973 ASSEMBLY, H.O.T. DETECTOR MODULE
EBARA A10S Multi-Stage Dry Pump with Controller
AMAT 0041-05535 Liner, Cathode, Direct-Cooled, Baffle Y2
AMAT 0090-A9920 IPU 2.4Ghz DR200 Base w/Software
AMAT 0100-00777 PCB, DUAL STEPPER INTERFACE
AMAT 99DE0044000 PICK LIST FOR NEW
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