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0190-10042 AMAT 半导体系统 运城

0190-10042 AMAT 半导体系统 运城

0190-10042 AMAT 半导体系统 运城

美国应用材料(AMAT)发布了可形成适用于22nm～14nm逻辑IC的低介电率(low-k)层间绝缘膜的两款制造装置。分别是成膜装置“Producer Black Diamond 3”和紫外线(UV)固化装置“Producer Nanocure 3”。

由发布可知，因微处理器耗电量的1/3为布线耗电量所占，因此市场上要求能够在降低布线耗电量的同时，确保高机械强度的层间绝缘膜。对此，应用材料开发出了第3代low-k膜，并投产了可制造这种low-k膜的装置。第3代low-k膜是带有纳米级空孔的多孔质(Porous)膜，相对介电常数(k)仅为2.2。并提高了空孔率的均匀性等，使机械强度比原来最大改善至2倍，可以耐受成膜后晶圆处理工序和封装组装工序的应力。据介绍，为提高均匀性，应用材料改进了UV固化装置的光学系统及反应室(Chamber)的设计，固化均匀性与原来相比最大提高了50%。并且，通过组合使用高输出功率的UV光源和低压固化工艺，将固化处理的速度提高了40%。

AMAT 0010-A0213 OPTICAL HEAD CMP
XYCOM XYCOM XVME-675 RQANS1
LAM RESEARCH 853-00198-002 GATE & LINKAGE INNERDOOR ASSY
LAM 716-028722-161 QUARTZ RING (FOR ESC CHUCK) KIT LAM TCP9400 POLY


BOC EDWARDS A540-11-999 BOC EDWARDS EXIT OIL FILTER CR BASE MODULE;

40CR
XYCOM PROFACE FP2500-T12 RQAUS1
NEW Xycom VME XVME-977 Hard / Floppy Drive Module
XYCOM VMEbus CPU XVME-674 *NICE*
XYCOM VMEbus XVME-674 *NICE*
XYCOM I/O MODULE XVME-401 *NEW IN BOX*
XYCOM XVME-674 CPU *USED*
XYCOM PROFACE GPH70-SC41-24VP (REV H) RQAUS1
XYCOM PROFACE GPH70-SC41-24VP RQAUS1
Nikon Scanner S202A Nikon 4S018-384-AFDRVX2 PCB
ASML PAS 2500 5000 STEPPER FLYS EYE 4022.435.0558.2 116534-8207/077


DAINIPPON SCREEN DNS FILE NO.:SEBA-000061 SEL NO.: SK0803-2003010


ASML PAS 2500 5000 STEPPER Y SLATOR
KLA TENCOR 8100 6400 WIEN FILTER CONTROLLER CHASSIS
KLA TENCOR 6200 6400 8100 HCI CHASSIS CONTROLLER
ASML PAS 2500 5000 STEPPER OCU OPERATOR CONTROL UNIT
Nikon Scanner S202A Nikon 4S018-416-1 RCDRVX2 PCB
NIKON INTERFEROMETER 4S018-167 ALGLIUIF2 PCB
APPLIED MATERIALS AMAT GLASSMAN HIGH VOLTAGE DECEL PSC 0240-96561

0090-91434
TEL TOKYO ELECTRON GATE VAT VALVE VD012-013275-1 48132-CE24-AKG1


Nikon Scanner S202A Nikon 4S018-608-WL3I06 PCB
Nikon Scanner S202A Nikon 4S017-983-VME-I/F-M PCB
AMAT 0020-30708 Ring, Clamp, Vespel, REM FGR, AL 150MM, Flat
AMAT 0020-34438 CHASSIS, BULKHEAD, DPS
AMAT 0190-00462 Mass Storage, Module, SBC
AMAT 0200-40218 DOME, TAPERED STYLE, FIRE POLISHED
AMAT 0500-00190 HELIX IS CONTROLLER 19" PANEL
MKS INSTRUMENTS 117426-G1 FINAL ASSY, IDA SYSTEM
ROTATION POWER 2130-C2 ILLUMINATION CONTROLLER, DUV, 208VAC, 1000W, 60

HZ
LAM 716-331157-013 DISK, INTERFEROMTER, TOP GAS
AMAT 9090-01193 ASSY GAS PANEL CTRL (NO OVENS)
GASONICS A95-062-01 ARM II,ASSY,W/PCA,A94-062-01:MOTOROLA
EDWARDS D15471025 Magnet Assembly
SHIN-ETSU Alpha8-cap QUARTZ, CAP TEL Alpha8
ELECTRO SCIENTIFIC INDUSTRIES 110M-PS esi LIGHTWAVE 110M-PS Diode

Laser with SER
Daihen SGM-30B1 Generator, Power, Frequency: 2460M Hz, Rated Power:

3000W, 200V
PACIFIC SCIENTIFIC 121-236 SC755A040-08, CONTROLLER 90S SPIN HI TORQUE

SC 750 SE
MITSUBISHI A3ACPUP21 MELSEC PROGRAMMABLE CONTROLLER; A3ACPU-PU21


MACTRONIX HZN850P5 Wafer Transfer and Handling-Horizon
NICOLET ECO-8M FT-IR Spectrometer ECO-8M-Metrology
XYCOM PM-102085A 100-240VAC 50/60Hz 3-1.5A OPERATOR INTERFACE 3115T,

TESTED
1 USED XYCOM 8503 OPERATOR INTERFACE CRT 115/230V
Proface XYCOM 4115T Industrial Computer Color Touchscreen, Nice Used

Tested
Proface XYCOM 4115T Industrial Computer Color Touchscreen, Very Nice

Used Tested
Denoyer Geppert T14 Multi-Torso: Female Configuration
CTI-Cryogenics High Vacuum Pump Cryo-Torr 8F Cryopump
1 USED XYCOM AUTOMATION 4115 T INDUSTRIAL COMPUTER COLOR TOUCHSCREEN

*MAKE OFFER
XYCOM Display/Operator Interface Unit 38-K42IMA-01 _ P/N: 14HC4AAZ _

99437-001B
Bird 4410A RF Wattmeter Kit Bird (4410-097 Refurb) ALL NEW ELEMENTS

0.45-1000MHz
Agilent 2100 BioAnalyzer G2938A
Physik Instruments E-463-00 90-120V,AC-45VA,16AT,Amplifier
Physik Instruments E-463-00 HVPZT Amplifier, 90-120V,AC-45VA,16AT


TEL TF234477-001 Assy, Power, Supply, Heater/Chiller
SCP GLOBAL 7471314A ROBOT 8400 UPPER BODY W/COVER for FSI
AMAT 0200-09847 Ring, Clamp, Flat, AL 100MM, .95HT Finger
XYCOM XYCOM 9450 RQAUS1
AMAT 0040-85748 CHAMBER LINER RIGHT, YTTRIUM, STEP,PRODU
AMAT 0040-80332 BOSS,UPPER GRIPPER
XYCOM PROFACE 3112T RQAUS1
XYCOM PROFACE 1341-1300-512-4GB-2K RQAUS1
AMAT 0242-18955 KIT, 300MM PCII PROCESS KIT
TEK TKD-100/8200 Chiller
AMAT 0222-09042 28M (92FT) CABLES REM. TO MAIN09042-1
XYCOM XYCOM 5019-A10000000-1111 RQAUS1
AMAT 0010-91829 Source Isolation Vacuum Gate Valve, 08140-FA24-

AIB1/004 A-649610
XYCOM PROFACE GPH70-LG11-24V RQAUS1
AMAT 0040-34148 LINER, GDP, 43R HOLE, HART 200MM
Harvard 33 Twin Syringe Pump Standard Infuse/Withdraw
APPLIED MATERIALS BROOKS ROBOT CONTROLLER 168904
AMAT 50309050000 Electron Column Beam Gun SV300 SemVision Opal Applied

Materials
Omron ES-002623 UNIT, SENSOR TEMP T/C
XYCOM PROFACE QPK-3D200-L2P RQAUS1
AMAT 0040-80232 CONNECTOR STRAP ASSY - QX
XYCOM PROFACE GP470-EG31-24V RQAUS1
AMAT 21016404078 SERVO POWER SUPPLY
AMAT 0200-09151 Ring, Electrode 125MM EB
AMAT 4060-00023 MANF 16STATION W/DNET 32 I/O
AMAT 0020-26975 6" BUFFER BLADE THIN METAL
TEL MB3M87-041637-11 COLUMN, TRAP
AMAT 0020-61991 COVER HOUSING WAFER HEAD 300mm
XYCOM XVME-674 CPU BOARD VMEBUS XVME674 USED
DAINIPPON SCREEN DNS EEW EDGE EXPOSURE BOX EEUE-001X
ASML STEPPER RETICLE ASML PAS2500 4022.431.1153.3 OVERLAY
TEL TOKYO ELECTRON UW200-Z WET STATION IWAKI BELLOWS PUMP FF-20BT1

E101
AMAT 0020-45069 SEAL, METAL, E-TYPE, 7.669 ID
AMAT 0200-02962 SINGLE RING QUARTZ 200MM SNNF (.25 HT) R
CTI 8510 Compressor 80313 Cryo Pump Compressor